| 00664099 | Empire Township (historical) | 1970 | CENS | 1136 | 271 | 0 | 1136 |
| 00664099 | Empire Township (historical) | 1980 | CENS | 1224 | 360 | 0 | 1224 |
| 00664099 | Empire Township (historical) | 1990 | CENS | 1340 | 426 | 0 | 1340 |
| 00664099 | Empire Township (historical) | 2000 | CENS | 1638 | 515 | 8 | 1630 |
| 00664099 | Empire Township (historical) | 2010 | CENS | 2444 | 792 | 8 | 2436 |
| 00664099 | Empire Township (historical) | 2020 | CENS | 3177 | 1021 | 4 | 3173 |